Si3N4 color chart for LPCVD grown silicon nitride, HTE Labs provides process specialties wafer foundry, thin film vacuum deposition services, applied thin film processing for analog and mixed signal bipolar manufacturing processes, Analog CMOS wafer foundry, R&D support, research and development support for microelectronics and process specialties wafer Fab processing to customers from semiconductors and microelectronics industry. Bipolar wafer foundry includes the following processes: 20V bipolar process,45V bipolar process,75V bipolar process,25V super-beta bipolar process and high voltage dielectric isolated bipolar processes. R&D support is provided in the following fields of microelectronics: test and measurement, medical instrumentation, industrial process control and communications, thin film active and passive components technologies, flip chip technology (TiW/Cu/Cu/SnPb), MEMS technology, smart sensor technologies (inertial, pressure, temperature, gas and smoke detectors), optoelectronic technologies and components, discrete and integrated circuits technology development for special applications, LiNbO3 applications including SAW, Ti diffusion, light wave guides and Mach-Zender light modulators. Specialty wafer Fab processing: epi deposition, epitaxy, SiGe, epi, diffusion and oxidation, ion implant, LPCVD nitride, PECVD nitride Si3N4, SiO2, platinum silicidation, photo-lithography, plasma etching, silicon micro-machining with KOH anisotropic etch, backside sputter depositions of Ti/Ni/Ag, gold deposition, gold alloy, lift off processes, Ti/Pt/Au lift off process, sputter depositions of thin film resistors : SiCr, NiCr, TaN2, silicon wafers back grind and polish followed by tri-metal backside sputter depositions, gold backside sputter depositions and alloy : gold electroplating and gold bump, wafer probing, dicing services, wafer saw, package development, solid via packages, packaging and test services, failure analysis services, SEM, scanning electron microscopy, ellipsometer measurements, four point probe measurements.

	Si3N4 Color Chart for LPCVD grown silicon nitride
HTE Labs

Nitride Thickness COLOR COLOR CODE COLOR NAME [Å]       375   D2B48C Tan 562.5   A52A2A Brown 750   B32F79 Dark Violet to red violet 937.5   2E73F3 Royal blue 1125   ADD8E6 Light blue to metallic blue 1312.5   D9ECB3 Metallic to very light yellow-green 1500   F9F9C8 Light gold or yellow slightly metallic 1687.5   DAA520 Gold with slight yellow-orange 1875   F6853D Orange to Melon 2062.5   B32F79 Red-Violet 2250   5D3694 Blue to violet-blue 2325   0000FF Blue 2437.5   0083AE Blue to blue-green 2587.5   00FF00 Light green 2625   84D82E Green to yellow-green 2737.5   84C82E Yellow-green 2812.5   E2DE2B Green-yellow 2925   FFFF00 Yellow. 3090   FFB500 Light orange 3195   FA7FC1 Carnation pink 3322.5   E82362 Violet-red 3487.5   B32F79 Red-violet 3570   EE82EE Violet 3600   5D3694 Blue Violet 3697.5   0000FF Blue 3765   008080 Blue-green 3900   008846 Green (Broad) 4050   9ACD32 Yellow-green 4200   ADFF2F Green-yellow 4305    FFFFD2 Yellow to Yellowish (not yellow but is in the position where yellow is to be expected. At times is appears to be light creamy gray or metallic) 4357.5   FFDE93 Light orange or yellow to pink borderline 4500   FA7FC1 Carnation pink 4725   EE82EE Violet-red 5100   AE82FF Bluish (Not blue but borderline between violet and blue-green. It appears more like a Mixture between violet-red and blue-green and over-all looks grayish. 5400   00A080 Blue-green to green (quite broad) 5775   FFFF8C Yellowish 6000   FFA500 Orange (rather broad for orange) 6150   FA8072 Salmon 6375   B32F79 Dull, light red-violet 6490   EE82EE Violet 6525   5D3694 Blue-violet 6675   0000FF Blue 6900   0083AE Blue-green 7125   84C82E Dull yellow-green 7225   FFFF00 Yellow to Yellowish 7425   F3770C Orange 7500   FA7FC1 Carnation Pink 7650   E82362 Violet-red 7575   B32F79 Red-violet 7950   EE82EE Violet 8025   5D3694 Blue-violet 8250   008846 Green 8325   84C82E Yellow-green 8400   008846 Green 8850   EE82EE Violet 8925   B32F79 Red-violet 9075   E82362 Violet-red 9300   FA7FA1 Carnation Pink-Salmon 9375   FFA500 Orange 9600   FFFF00 Yellowish 9900   47B0E3 Sky blue to green-blue 10500   FFA500 Orange 10875   EE82EE Violet 10950   5D3694 Blue-violet 11550   84C82E Dull Yellow-green

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Last updated: July 06, 2009

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